Analysis at the Atomic Level: The Atom Probe Field-Ion Microscope

Figure 2. Angular distributions of inelastic scattering around the undiffracted beam and around a beam diffracted through an angle a. The shaded area represents the contribution from the diffracted beam to the intensity collected by an on-axis aperture of semi-angle A3. [6] Egerton, R. F., Electron Energy Loss Spectroscopy in the Electron Microscope, Plenum Press, New York (1986). [7] Steele, J. D., Titchmarsh, J. M., Chapman, J. N., and Paterson, J. H., Ultramicroscopy 17, 273 (1985), [8] Leapman, R. D., and Swyt, C. R., Removal of Plural Scattering in Electron Energy Loss Spectra from Organic Samples: A New Approach, Microbeam Analysis (1987) p. 273. [9] Zaluzec, N. J., Spectral Processing and Quantitative Analysis in Electron Energy Loss Spectroscopy Using a Digital Filter Technique, Analytical Electron Microscopy (1987). [10] Bourdillon, A. J., and Stobbs, W. M., Ultramicroscopy 17, 147 (1985). [11] Zaluzec, N. J., The Influence of Specimen Thickness in Quantitative Energy-Loss Spectroscopy, 41st Ann. Proc. Electron Microsc. Soc. Am., p. 388. [12] Egerton, R. F., Quantitative Microanalysis by Electron Energy Loss Spectroscopy: The Current Status, Scanning Electron Microscopy (1984) part 1, p. 505. [131 Egerton, R. F., SIGMAL: A Program for Calculating LShell Ionization Cross Sections, 39th Ann, Proc. Electron Microsc. Soc. Am. (1979) p. 198. [14] Rez, P., and Ahn, C., Comparison of Theoretical EELS Edges with Experimental Data, Analytical Electron Microscopy (1984) p. 294. [15] Malis, T., and Titchmarsh, J. M., A k-Factor Approach to EELS Analysis, EMAG 1985, Institute of Physics, Bristol, U.K. [16] Hofer, F., Ultramicroscopy 21, 63 (1987). [17] Craven, A. J., and Buggy, T. W., Ultramicroscopy 7, 27 (1981). [18] Thomas, L. E., Ultramicroscopy 18, 173 (1985).